Project leader
ORSAY PHYSICSPartners
MUQUANS, AZUR LIGHT SYSTEMS, Laboratoire Aimé Cotton, Laboratoire Photonique, Numérique et NanosciencesFunders
FUI,![](https://www.pole-scs.org/wp-content/themes/polescs/assets/images/projet-innovant.png)
COLDFIB
The Nano Machining Challenge
The world of the electronic components evolves regularly to the miniaturization by integrating an increasingly significant number of transistors. Dimensions being increasingly small (technology 10 Nm, 7 Nm even 5 Nm), the instruments analyzes currently used, like the beams of focused ions (FIB), reach their limits. It is thus necessary to carry out a technological rupture in order to be able to observe, analyze and modify components and structures with the scale of the nanometer.
The ColdFIB project wants to take up this challenge of the nano machining by the coupling of two state-of-the-art technologies: the laser cooling of the atoms, and the transport of particles charged. Very innovative, this industrial solution, based on a source Dions obtained starting from atoms cooled by laser and ionized, will make it possible to carry out beams of ions to the unequalled performances and to reach sizes of engravings of some nanometers.
Joining together three PMEs of high technologies (Orsay Physics, Muquans and Azur Light Systems) and of 2 research laboratories (Laboratory Aimé Cotton, Photonic, Digital Laboratory and Nanosciences), COLDFIB, labeled by the SCS Clusters and Road of the Lasers, proposes to produce a tool able to answer a very broad field applications like the micro-electronics, the analyzes of surface, the realization objects nanometric and that with ultimate resolutions.