Project leader
Ion Beam ServicesPartners
R2D Ingénierie, IBS, MGP Instruments, Metraware, LP3, GREMIFunders
FUI,![](https://www.pole-scs.org/wp-content/themes/polescs/assets/images/projet-innovant.png)
ALDIP
Laser Activation of Dopants Implanted by Plasma Immersion
Activation without thermal degradation of the substrate
Very high temperature activation for high gap materials
Non-broadcast activation for advanced microelectronics.